Welcome to the internet pages of the Institute of Nanostructure Technologies and Analytics, Technological Electronics Department, Faculty of Electrical Engineering and Computer Science, University of Kassel. Together with the Department of Technological Physics we are the Institute of Nanostructure Technologies and Analytics.
We have been working on research and development of optical and opto-electronical devices with micro- and nanostructure technologies for more than 10 years now. Our topics are focussed on fundamental research, but they are always application-oriented.
Our Institute is equipped with modern cleanroom facilities including a class 1 cleanroom section. We use semiconductor technologies as Molecular Beam Epitaxy (MBE), several deposition techniques, wet- and dry-chemical etching technologies, focussed ion beam (FIB) technologies and optical lithography, electron beam lithography and nanoimprint lithography. Laboratory facilities for our analytics section are a further important part of our institute.
With our Optical MEMS projects we have been able to achieve international records. Our work on micro mirror arrays was awarded with the "European Grand Prix for Innovation Awards".
We cooperate with the "Center for Interdisciplinary Nanostructure Science and Technology" (CINSaT), the "Nanonetzwerk Hessen" (nnh10-9), the "Nanoimprint Consortium Hessen" (NIH) and the Technology Transfer Section of the University of Kassel. Prof. Dr. Hillmer is coordinating the cooperation between the University of Kassel and the "Nanonetzwerk Hessen".